During this paper, The brand new lapping slurry and sharpening slurry are introduced. As well as the deliquescence diploma of CLBO is fallen to least expensive. A brand new Doing work engineering is usually adopted. Following rough polishing, the concentration of ultra-precision sprucing slurry is increased correctly. So does the ultra-precision sprucing velocity, as well as wiping velocity is faster as opposed to deliquescence speed. The CLBO crystal area roughness can reach 1nm and continue to keep the floor high quality effectively. Accessibility through your establishment
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By way of example, the current concave OC could be replaced by a plane mirror which could mitigate the power density to the area of M1 plus the diamond. In addition, utilizing superior hurt threshold coatings for M1 and diamond would also improve the output ability with no damages. Then, the NIR laser within the 2nd Stokes wavelength can be large ample, as well as its good beam high quality, to make the final DUV laser at 193 nm which has a large regular energy.
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Mainly because of the thermal lens influence inside the good-condition lasers, When the heating administration is insufficient, it is not easy to get the solid-condition laser with a substantial energy and a substantial beam excellent simultaneously. Just lately, with the event of The skinny disk laser and one-crystal fiber (SCF) laser, a substantial-ability laser at the fundamental wavelength (1 μm) had been recognized with a fantastic beam quality even with a TEM00 mode beam [4,24], which would be fantastic candidates for the elemental of your DUV laser technology. An additional candidate for the fundamental will be the large-electrical power fiber laser which could possibly be reached by coherent beam mixture with M2 value less than one.
On the opposite aspect, the power scaling with the NIR laser is yet another factor to boost the common energy on the 193-nm DUV laser. Because of the not enough the substantial-energy amplification Alternative on the NIR laser (for instance at 1553 nm), nonlinear frequency procedures like optical parameter oscillation (OPO) may very well be applied to build a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength as well as acquiring relative better energy [21]. Just lately, a diamond Raman laser confirmed its ability in attaining a click here substantial electric power and also a superior conversion effectiveness in the 1st Stokes in the 1-μm laser [22,23], which implies the possibility for being applied within the 193-nm DUV laser generation due to its higher Raman gain and enormous frequency change.
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Inside the scientific and industrial programs, the beam quality of the DUV laser is also an important parameter. Particularly, the beam high-quality with the DUV laser substantially impacts the laser machining success. The beam excellent in the DUV laser is decided by that of the basic laser and the crystal for your frequency conversion. Lately, a significant-electricity DUV laser (>ten W) at 258 nm was reported by using a beam high quality of M2 < 1.five, which was created by FHG of a Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would produce a much better laser machining consequence in comparison with the past DUV lasers with larger M2.
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The beam profile revealed in Figure 7b shown a great beam good quality as on the list of deserves of Raman laser, which might be effective to generate a 193-nm DUV laser with a high quality beam.
Its UV absorption edge reaches 180 nm. The productive nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about 2 times as substantial as that of KDP. CLBO crystals could be developed from your stoichiometric melt with lessen viscosity.
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